Nanofacility
The Nanofacility is part of the Kavli Institute of Nanoscience Delft in the Faculty of Applied Sciences at the Delft University of Technology. In particular, the Nanofacility provides tools to researchers and it develops, optimizes and maintains fabrication methods.
The Nanofacility has a twofold role:
- Facility function,
- Technology development, research and education
Facility function
The Nanofacility is owner of an advanced technological infrastructure for the fabrication of nanostructures and nanodevices.
In particular, the Nanofacility provides tools to researchers and it develops, optimizes and maintains fabrication methods.
Users are primarily researchers and students from the Kavli Institute of nanoscience and from research groups in- and outside TU Delft and from industry.
Its facilities feature:
* High-resolution electron beam lithography
* Optical lithography
* Focused ion beam
* Mask fabrication for optical lithography
* Sputter deposition
* Atomic layer deposition
* Dry etching
* Wet processing
* Thermal processing
* High resolution inspection
All equipment is installed in a class 10000 cleanroom environment of the new Van Leeuwenhoek Laboratory and can be reserved by trained users.
There is a monthly introduction for New Users.
The Nanofacility participates in the national organization NanoLab NL, a virtual laboratory located at four sites in The Netherlands. NanoLab NL provides an extensive infrastructure for nanotechnology on a national scale.
Technology development, research and education
The Nanofacility group participates in technology development, either project-wise with partners or in the frame of its more general nano-mission.
In this context, the group contributes in selected areas of the national NanoNed research program. Over the years the group has developed into experts in techniques like high resolution e-beam lithography, focused ion beam technology, patterning with reactive plasmas, in technology for a variety of nanodevice structures and technology. For more information about possibilities/opportunities one is welcome to contact the scientific staff members.
